![Peter Bonitatibus](/sites/default/files/styles/large/public/2024-01/Bonitatibus-Peter.png?itok=Ta_rl6Sl)
Associate Professor, Chemistry and Chemical Biology
Research Expertise
New molecule synthesis; inorganic and organometallics
Research
Interest in new molecular precursors (for EUV, ALD, CVD) that will address issues that process engineers or tool manufacturers currently face with today's available precursors, e.g., new metal-containing molecules and support of experimental films.