Advanced Interconnects/Dielectrics

Researchers develop new materials and techniques to improve chip performance, reliability, and resistance to damage.

Current Research:

  • Fundamental interfacial and transport phenomena related to dielectric breakdown, device reliability, resistive memory, phase change, and thermal interface materials
  • Ultrathin layer materials such as graphene that promote van der Waals epitaxial growth of interconnect metals; first-level metals including Ru, Re, and Ir; graphene as a barrier layer to prevent metal diffusion
  • Epitaxial layer growth and in situ transport measurements to study and discover new materials for future interconnects which yield high conductivity at small (<10 nm) dimensions 
  • Semiconductor materials, epitaxy, and defects; interconnect materials and degradation mechanisms 
  • Multiscale simulations of the structure and properties of oxides as dielectrics, and methodologies used to search for alternative dielectrics to silicon dioxide 

Faculty

Max Bloomfield
Research Scientist, Scientific Computation Research Center
Research Expertise:
Process simulation, Bayesian methods, machine learning
Daniel Gall
Professor, Materials Science and Engineering
Research Expertise:
Interconnects, thin-film deposition
Liping Huang
Professor, Materials Science and Engineering
Research Expertise:
Multiscale simulation, dielectrics, graduate education
Robert Hull
Professor, Materials Science and Engineering
Research Expertise:
Microelectronic materials and metrology
Jie Lian
Professor, Mechanical, Aerospace, and Nuclear Engineering
Research Expertise:
Microelectronic materials, 2D materials, thermal management
Toh-Ming Lu
Professor, Physics, Applied Physics & Astronomy
Research Expertise:
Advanced high-speed interconnects
Rahmi Ozisik
Associate Professor, Materials Science and Engineering
Research Expertise:
Polymer and polymer nanocomposites science and engineering
Joel Plawsky
Professor, Chemical and Biological Engineering
Research Expertise:
Transport processes, thermal management, dielectric behavior
Ganpati Ramanath
Professor, Materials Science and Engineering
Research Expertise:
Atomic-level engineering of interfaces and their properties
Sufei Shi
Associate Professor, Chemical and Biological Engineering
Research Expertise:
2D materials, optoelectronics, optical spectroscopy
Jian Shi
Professor, Materials Science and Engineering
Research Expertise:
Neuromorphic engineering, spintronics, and optoelectronics
Ravishankar Sundararaman
Associate Professor, Materials Science and Engineering
Research Expertise:
Electronic structure simulations, materials discovery
Minoru Tomozawa
Professor, Materials Science and Engineering
Research Expertise:
Glass materials, mass transport, reliability
Gwo-Ching Wang
Professor, Physics, Applied Physics & Astronomy
Research Expertise:
Metals, semiconductors, structural and electrical properties
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