Metrology

With 50 billion transistors on a single chip, researchers strive for more precise measurements and imaging techniques, and for new ways of taking and predicting those measurements.

Current Research:

  • Wide bandgap and ultra-wide bandgap semiconductor characterization and epitaxy for optoelectronics and power devices 
  • Growth and physical properties of ultrathin and thin films, and nanostructures. Inventing techniques using electron diffraction for texture analysis and reciprocal space mapping of epitaxial thin films and nanostructures
  • Coherent X-ray scattering and imaging neutron scattering; light matter interactions; AI implementations
  • Development of novel processes for device fabrication, non-contact lifetime measurement

Faculty

Ishwara Bhat
Professor, Electrical, Computer, and Systems Engineering
Research Expertise:
Semiconductor materials and processing
Theodorian Borca-Tasciuc
Professor, Mechanical, Aerospace, and Nuclear Engineering
Research Expertise:
Thermal metrology, solid-state cooling, heat conduction
Edwin Fohtung
Associate Professor, Materials Science and Engineering
Research Expertise:
Probing structure and dynamics
Robert Hull
Professor, Materials Science and Engineering
Research Expertise:
Microelectronic materials and metrology
Jie Lian
Professor, Mechanical, Aerospace, and Nuclear Engineering
Research Expertise:
Microelectronic materials, 2D materials, thermal management
Sufei Shi
Associate Professor, Chemical and Biological Engineering
Research Expertise:
2D materials, optoelectronics, optical spectroscopy
Chaitanya Ullal
Associate Professor, Materials Science and Engineering
Research Expertise:
Polymers, nanofabrication, and optics
Gwo-Ching Wang
Professor, Physics, Applied Physics & Astronomy
Research Expertise:
Metals, semiconductors, structural and electrical properties
Esther Wertz
Associate Professor, Physics, Applied Physics and Astronomy
Research Expertise:
light-matter interactions, 2D materials, plasmonics
Christian Wetzel
Professor, Physics, Applied Physics & Astronomy and Materials Science and Engineering
Research Expertise:
Wide bandgap semiconductors, epitaxy, characterization, optoelectronics
Ingrid Wilke
Professor, Physics, Applied Physics & Astronomy
Research Expertise:
Industrial electronic and photonic THz wave devices and systems
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